DIEAG welcomes ASML to Behrens-Ufer: A milestone for Berlin’s semiconductor industry

In a landmark event attended by Franziska Giffey, Senator for Economics, Energy and Public Enterprises and Mayor of Berlin, and Oliver Igel, District Mayor of Treptow-Köpenick, DIE Deutsche Immobilien Entwicklungs AG (DIEAG) officially handed over the first completed spaces at the BE-U | Behrens-Ufer commercial district to ASML, a leading semiconductor equipment supplier.

ASML has moved into 13,000 square meters of production, laboratory, and office space, including 5,500 square meters in the listed Hall 5 assembly centre and additional floors in the neighboring Building C. The newly developed facilities, located in the Nord-Karree of Behrens-Ufer in Berlin-Oberschöneweide, will initially create 200 jobs and serve as a strategic hub for ASML’s production, research, and development of key components for lithography machines.

ASML’s operations at Behrens-Ufer include researching new production technologies, manufacturing essential lithography system components, and training young talent in its dedicated workshop. The development reflects Berlin’s growing status as a global innovation hub.

Robert Sprajcar, CEO and Chairman of DIEAG, praised the collaboration: “Over the past 18 months, we’ve transformed a historic building into a cutting-edge facility. This project demanded exceptional effort from everyone involved. We are proud to welcome ASML to BE-U, as their values of innovation, sustainability, and global vision align perfectly with ours.”

Franziska Giffey emphasized ASML’s role in technological progress: “ASML is a key player in digitalization and innovation—locally in Berlin and globally. Their cutting-edge lithography systems drive advancements in AI, medical technology, and more. Their move to Behrens-Ufer underscores Berlin’s position as a center for innovation and creates future-proof jobs.”

Oliver Igel highlighted the site’s industrial revival: “ASML’s arrival at Behrens-Ufer signals the beginning of a new era for Oberschöneweide as an industrial hub. This move revitalizes the area’s storied history and propels it into a modern future.”

Dr. Markus Matthes, Managing Director of ASML Berlin, echoed the optimism: “The demand for microchips is growing, and as a key player in the semiconductor industry, ASML will expand globally and in Berlin to meet these needs. At Behrens-Ufer, we’ve developed a state-of-the-art facility that offers an attractive environment for our employees while enhancing our research, development, and production capacities.”

The 10-hectare Behrens-Ufer site is undergoing a transformative redevelopment, blending historic and new construction to create 235,000 square meters of rental space for businesses across three phases. The full project is expected to be completed by 2029, with ASML’s move marking a significant first step in the area’s evolution into a dynamic technology and industrial district.

With sustainable infrastructure, modern facilities, and a commitment to fostering innovation, Behrens-Ufer is poised to become a key destination for advanced industries in Berlin, setting a precedent for future developments in the region.